JEOL 6610 LV SEM

Technical specification

Resolution: 3 nm (@ 30 kV)
Magnification: 5 – 300,000x
Accelerating voltage: 0.3 – 30 kV
Vacuum mode: high vacuum, low vacuum/variable pressure

Equipment specification

EDX detector: Oxford Instruments X-Max 80mm2
EBSD detector: Oxford Instruments Nordlys
Cryo system: Quorum Technologies PP3000 
(temperature range down to ~ -190 °c)