Electron Backscatter Diffraction (EBSD)

  • Crystalline and polycrystalline materials can be analysed using Electron Backscatter Diffraction (EBSD) to study the crystallographic structure, such as: grain orientation, misorientation, texture measurement, grain size distribution, grain boundary type and phases.
  • This technique can be used simultaneously with EDS.
  • Typically, the sample is tilted to 70° to maximise the intensity of diffracted signal.
  • The electrons are subsequently diffracted by the tilted sample and the pattern is detected with a fluorescent screen.
  • The pattern is characteristic of the crystal structure and orientation and is named kikuchi pattern.